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https://univ-orleans.hal.science/hal-03431563
Submitted on : Tuesday, November 16, 2021-5:31:32 PM
Last modification on : Friday, March 24, 2023-2:53:24 PM
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- HAL Id : hal-03431563 , version 1
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Erik von Wahl, Ianis Ellien, Thomas Lecas, Maxime Mikikian. Parametric study of methane dissociation and deposition rates in a Ar/CH4 RF plasma. Journées 2021 du GDR EMILI, Oct 2021, Palaiseau, France. ⟨hal-03431563⟩
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